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MSFET 3330: pH ISFET sensor

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Miniaturized solid-state pH sensor based on ISFET technology.

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Description

The MSFET3330 is an Ion Sensitive Field Effect Transistor (ISFET). As such it is a solid state, potentiometric sensor capable of measuring pH in the range of pH 1 to pH 14 with a linear response. It is characterized by high pH sensitivity, low drift, and low light sensitivity. The fabrication process is based on ion implantation, gate oxidation, diffusion, and a tantalum oxide (Ta2O5) gate dielectric.

Characteristics

  • Small size
  • Glass-free construction
  • Robust design
  • Dry storage
  • wide range of applications

Key Specifications

Options

  • Standard housing
  • Miniature packaging

Documents

Functionalized Ion-Selective ISFET sensors

Microsens' portfolio also includes MSFET sensors with ion-selective membranes. Currently, ion-selective ISFET sensors are available for Potassium (K+), Nitrate (NO3-), Sodium (Na+) and Ammonia (NH4+) - MSFET334x sensor page. Other ion-sensitivities such as MSFET for the measurement Phosphate (H2PO4-) are under development.

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