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MSGS Miniature gas sensor

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Miniature semiconductor gas sensor for the measurement of VOC

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Description

The MSGS miniature semiconductor gas sensors are manufactured using standard microelectronic technology and silicon micromachining techniques. Their gas sensitive element consists of a semiconducting metal oxide layer deposited on a thin membrane containing a micro-heater element. The sensitive area is thermally insulated from the silicon substrate to minimize electrical power consumption.

The MSGS gas sensor employs a thin layer of SnO2 for the detection of reducing gases such as Carbon Monoxide (CO), Hydrocarbons (HC) and Volatile Organic Compounds (VOC).The sensor is available SMD packaging (MSGS 5000i).

Applications

  • Indoor air quality (IAQ)
  • Industrial process control
  • Combustion control
  • Environmental monitoring
  • Security

Detectable Gases

  • CO: 5 - 1000ppm
  • C2H5OH: 10 - 500ppm
  • H2: 5 - 1000ppm
  • NH3: 5 - 500ppm
  • CH4: < 1000ppm

Datasheets

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