Intelligent Sensing: a Priority

Sensors are the interface between the real world and all information systems. They determine the degree of accuracy and efficiency of measuring and monitoring devices.
New generation integrated sensors in particular provide the answer to current needs in environmental control. They are conceived and produced similarly to the most up-to-date electronics and data acquisition systems, to the extent that they can be considered to be electronic devices in their own right.
The purpose of MICROSENS is to apply the latest technology to the industrial manufacture of intelligent silicon sensors. With the experience of more than eight years in Research and Development within the innovative frame of the CSEM Swiss Center for Electronics and Microtechnology, the team of scientists at MICROSENS has been developing integrated sensors and applications since the start-up of its independent activity in 1991. Its efficiency is stregthed by the cooperation with CSEM, Universisites and MiCS MicroChemical Systems, founded in 1998 by MICROSENS, private partners and MOTOROLA bringing its gas sensor manufacturing line.
Taking advantage of its experience on products, the engineering team of MICROSENS focus on applying the latest standard microelectronics to sensing devices, such as:

Integrated gas sensors for the detection of toxic or explosive gases, as well as for industrial process monitoring, environmental control and multi-sensing purposes.

Integrated electrochemical sensors including Ion-Sensitive Field-Effect Transistor (ISFET) for pH and specific ion concentration measurements, amperometric, sensors for the detection of oxygen in liquids and other electrochemically reactive compounds (e.g. chlorine in water) or biological agents in various solutions.

Silicon microstructures incorporating miniaturized sensor geometries, microcavities and membranes used for chemical and physical sensors, actuators and microsystems.

Leading-Edge Solid-State Technology

Integrated sensor design and production relies on microelectronic to ensure:

Flexibility
Thanks to the flexibility of photolithographic techniques, the sensor geometry can be designed to suit specific application needs.

Reproducibility
Batch production of integrated sensors uses microelectronic processes. Solid-state thin and thick films are made with automated and totally controlled deposition techniques. Standard microelectronic equipement enables the specified sensors to be accurately reproduced.

Compatibility
Bath-produced devices are competitive through the use of standard microelectronic preprocessing, as well as sensor material technology compatible with the latest developments in integrated circuit manufacturing techniques.

Specificity and stability
Sensor materials developed by MICROSENS and integrated sensor geometries are specified for each application. The functional efficiency of integrated sensors can be measured in terms of sensitivity and stability. Their functionality may be adjusted through the use of microsystem configurations.

MICROSENS: The Right Partner For Your Strategy

The success of MICROSENS in the field of integrated sensors and systems is achieved by R & D geared towards batch production, with the flexibility to satisfy your specific needs.

Research and development
The expertise of MICROSENS is obtained from extensive R & D and know-how is available to your production or development teams in order to produce the sensor system you require.

Innovation
The most recent technology, sensor design and sensing materials are used by MICROSENS to produce your sensor and product lines. Our scientists are experts in developing and patenting new ideas for improved measurement.

Industrial production
From prototypes to industrial production, MICROSENS offers customized batch manufacturing of integrated sensors. We can fulfill your requirements thanks to:

• Custom sensor design
• Processing following standard CMOS wafer production techniques
• Specific sensor material post-processing
• Silicon micromachining
• Packaging and tests
• Specific interface electronics
• Custom microsystem production

Testing and quality
MICROSENS applies stringent quality control to all stages of the sensor production. Final tests are carried out using standard automated procedures. Sensor specifications are monitored with your application's operating conditions, as defined by your technical staff.