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Summary

     
Silicon microstructures
 
 
produced by anisotropic etching of silicon, and specific photolithographic techniques
  
             
  Si-membrane sensors and actuators          
             
  Sensor Principle
Heat and electrical conduction variations 		 

Applications

  • Security
  • Environmental control
  • Industrial process monitoring
  • Laboratories
  • Chemical analysis systems (flow cells)
  • Gas flow systems
  • Medical
   
  Measurement
Heating resistance
Pressure
Temperature
Heat exchange
IR radiation
Flow (liquid and gas)
Charged particle radiation 		     
 

Key specifications

  • Application specific design
  • High thermomechanical resistance
  • High stability
  • Fast response time
  • Long life time
  

Microsystem

  • Custom control electronic interface
  • Signal processing
  • Low voltage interface
      


Microsens SA - Rue Jaquet-Droz 1 - 2007 Neuchâtel/Switzerland - Tel. +41 32 720 5161 - Fax +41 32 720 5744 - info@microsens.ch