Microfabricated SnO2 Gas Sensors for VOC sensingSensing PrincipleThe MSGS miniature semiconductor gas sensors are manufactured using standard microelectronic technology and silicon micromachining techniques. Their gas sensitive element consists of a semiconducting metal oxide layer deposited on a thin membrane containing a micro-heater element. The sensitive area is thermally insulated from the silicon substrate to minimize electrical power consumption. The measurement of specific oxidizing or reducing gases is based on a reversible conductivity change of the sensing element at an appropriate working temperature. |
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