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Summary

     
Integrated resistive gas sensors
  
 
developed with thin and thick films on insulated silicon microstrucutres
  
             
  Semiconductor gas sensor
MSGS		   Catalytic gas sensor
MCGS 		  Thermal conductivity gas sensor - MTCS  
 
Download datasheet
MSGS
MGSM3000
MSGS3001
MSGS3002
  
Download datasheet
  
 
  Sensor Principle
Semiconductor surface conductivity modification with reducing or oxidizing gas interaction. 		  Sensor Principle
Measurement of the temperature change induced by exothermic reaction with combustible gases.		   Sensor Principle
Measurement of the temperature change induced by the thermal conductivity of the gas itself.		  
       
  Measurement
O2, CO, NOx, H2, CH4,
Hydrocarbons
Solvents 		  Measurement
H2, CH4, C4H10, C2H5OH Hydrocarbons Solvants 		  Measurement
General gases Methane, Natural gas Inert gases, such as CO2 Binary mixture gases 		 
 

Key specifications

  • Typical concentration range 1 ppm - 10'000 ppm
  • High sensitivity at low concentrations lower detection limit : < 5 ppm
  • Low power consumption; continous mode at 400°C: = 50 mW
  • Pulse mode: = 1 mW
  • Fast response time; 90% signal level : < 30 sec.
  

Key specifications

  • Large concentration range : 0 -100% LEL (Lower Explosive Limit)
  • High reproducibility with differential measurements
  • Low power consumption; continous mode at 450oC : = 100 mW
  • Pulse mode: = 1 mW
  • Fast response time; 90% signal level : < 15 sec.
  

Key specifications

  • Typical concentration range 1 - 100% Vol.
  • Very stable long term operation
  • Physical method for gas concentration measurement
  • Low power consumption; typical heating power: < 6 mw
  • Fast response time; 90% signal level: < 20 sec.
  
 

Applications

  • Security :
    • toxic gases
    • explosive gases
  • Indoor air quality
  • Industrial process control
  • Combustion control
  • Environment
  • Exhaust gases
 

Applications

  • Security :
    • explosive gases
    • solvents
  • Alcohol vapour control
  • Industrial process monitoring
  • Food quality control
 

Applications

  • Natural gas quality control
  • Combustion control
  • Natural gas engine control
  • Environmental
 
 

Microsystem

  • Programmable operating mode for selectivity, stability and power consumption reduction
  • Multi-sensing device
  • Pre-calibrated device and signal processing
  • Temperature and humidity compensation
  • Sensor interchangeability using calibrated microsystem
 


Microsens SA - Rue Jaquet-Droz 1 - 2007 Neuchâtel/Switzerland - Tel. +41 32 720 5161 - Fax +41 32 720 5744 - info@microsens.ch